| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a film sticking device capable of sticking a thin sheet-like object such as an optical film to a substrate highly efficiently without including air bubbles and foreign matters and without generating deflection and wrinkles. <P>SOLUTION: In a film sticking device 1, a substrate 2 is mounted on a stage 11 and a film conveyed by a holding member 15 is held by chuck members 12. The chuck members 12 are provided corresponding to a plurality of sections dividing the pressing surface of a pressing member 13 which is formed in a flat plate shape. When an optical film 3 is in a prescribed position relative to the substrate 2 on the stage 11 while the optical film 3 is held by the chuck members 12, the optical film 3 is pressed and stuck to the upper surface of the substrate 2 by the pressing member 13 via the chuck members 12. <P>COPYRIGHT: (C)2013,JPO&INPIT |
