| 摘要 |
PURPOSE: A floating type substrate coater device is provided to detect impurities on the surface of a substrate regardless of the floating height of the substrate by mapping light distribution. CONSTITUTION: A floating type substrate coater device(100) includes a chemical supplying unit, two or more light emitting parts, two or more light receiving parts, and controlling parts. The chemical supplying unit supplies chemical on the surface of a substrate to be treated. The light emitting parts emit light through the substrate to be treated. The light receiving parts receive light through the substrate to be treated. The controlling part detects impurities on the surface of the substrate to be treated according to the amount light received in the light receiving parts. |
