| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a holding tool capable of controlling any deviation of the set position and the inclination of a hearth liner to be accommodated in a cooling hearth. <P>SOLUTION: As shown in Fig.1, an apparatus for manufacturing a semiconductor device includes a hearth liner 10 for accommodating a vapor deposition material, a cooling hearth 60 having a recess for holding the hearth liner 10, and a hearth liner-holding tool 30 for fixing the hearth liner 10 to the cooling hearth 60. The hearth liner-holding tool 30 is installed on a bottom part of the cooling hearth 60. <P>COPYRIGHT: (C)2013,JPO&INPIT |
