发明名称 ORIGIN POSITION SETTING METHOD OF FOUR-AXIAL ALIGNMENT STAGE
摘要 <P>PROBLEM TO BE SOLVED: To perform origin return operation of four-axial control while suppressing mutual interference between mechanical attitudes of driving shafts. <P>SOLUTION: The four-axial alignment stage is equipped with four driving units each comprising an XY&theta; guide and a ball screw direct-acting mechanism. A temporary origin position is set for each driving unit (S1), and origin return operation under four-axial control is performed based thereupon (S3). Then all-axis simultaneous servo-off operation is performed (S4), and a movement quantity of a guide block of each driving unit generated right after that is measured (S5) and stored (S6). The temporary origin position of each driving unit is corrected using a measured value of the movement quantity as a correction quantity (S7), and origin return operation based upon the origin position having been corrected, measurement and storage of a movement quantity right after all-axis simultaneous servo-off operation, and correction of the temporary origin position using a measured value of the movement quantity as a correction quantity are repeated. A temporary origin position when the movement quantity right after the all-axis simultaneous servo-off operation converges is set as an original position for actual origin return operation under the four-axial control. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012238078(A) 申请公布日期 2012.12.06
申请号 JP20110105162 申请日期 2011.05.10
申请人 IHI CORP 发明人 NAKAYAMA YUICHIRO;NAKAMURA KEIKO;MATSUO KENGO
分类号 G05D3/12;H01L21/68 主分类号 G05D3/12
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