发明名称 |
Mold for nanoimprint lithography and method for forming the same |
摘要 |
A mold for the nanoimprint lithography and a method for forming the mold are disclosed. The mold comprises a base socket, a plug chip and an adhesive. The plug chip provides a fine pattern to be transcribed in a top surface thereof. The base socket provides a pocket within which the plug chip is set such that the top surface thereof is pushed out from the top surface of the base socket. |
申请公布号 |
US2012308680(A1) |
申请公布日期 |
2012.12.06 |
申请号 |
US201213480578 |
申请日期 |
2012.05.25 |
申请人 |
INOUE NAOKO;SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
INOUE NAOKO |
分类号 |
B29C59/02;B82Y40/00 |
主分类号 |
B29C59/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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