| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a physical quantity sensor having a mounting structure that enables downsizing, excels in impact resistance, and inhibits decrease of manufacturing efficiencies, and an electronic apparatus using the same. <P>SOLUTION: A physical quantity sensor comprises: a mounting substrate 12 having a cavity unit (concave unit 22); a supporting substrate 24 arranged overlapping the cavity unit in planar view; a physical quantity sensor element 42 arranged at a position on a first surface (lower surface 28) of the supporting substrate 24 facing the mounting substrate 12, the position overlapping the cavity unit in planar view, and electrically coupled to the mounting substrate 12 through the supporting substrate 24; and a sealing member 34 that seals the physical quantity sensor element 42 and the supporting substrate 24. The supporting substrate 24 is cantilevered at the mounting substrate 12 by a bonding member having a coefficient of elasticity higher than that of the sealing member 34. <P>COPYRIGHT: (C)2013,JPO&INPIT |
