OPTICAL INTERFEROMETER SYSTEM HAVING VIBRATION-NOISE-EFFECT ATTENUATING CHARACTERISTICS

摘要

The present invention relates to an optical interferometer system having vibration-noise-effect attenuating characteristics, which makes it possible to attenuate vibration noise effects and implement a high resolution optical shape measuring system by using the direct adhesion of a partially reflective film and an object to be measured, wherein the invention comprises: an optical interferometer which has a reference signal generating means attached so as to be spaced by a predetermined distance from the object to be measured, and which is adapted such that the reference signal and a measurement signal, that is reflected from each of the boundary surfaces of the object to be measured, have the same vibration and noise such that the vibration and noise of the reference signal and the measurement signal cancel each other out; and a light-receiving unit for measuring the object to be measured, by using the optical interference signals transmitted from the optical interferometer.