| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic lens array advantageous to realize both of accuracy for refracting plural load particle beams and a small size. <P>SOLUTION: In the electrostatic lens array, a first electrode plate and a second electrode plate comprise plural opening subset regions including three or more openings for passing load particle beams aligned with each other. An insulation spacer includes plural through holes corresponding to the plural opening subset regions of the first and second electrode plates respectively, and each having an outer shape larger than that of the corresponding opening subset region. The insulation spacer contacts the first electrode plate in a region between the plural opening subset regions of the first electrode plate, contacts the second electrode plate in a region between the plural opening subset regions of the second electrode plate, and are arranged between the first electrode plate and the second electrode plate, so that the plural through holes are aligned in the corresponding opening subset regions of the first and second electrode plates. <P>COPYRIGHT: (C)2013,JPO&INPIT |
