ANGULAR VELOCITY SENSOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an angular velocity sensor element which produces a higher output sensitivity.

SOLUTION: An angular velocity sensor element has: a first bent section 32 at a connection portion between a first detection electrode vibrating body 34 and a first connecting beam 28; and a first bent section detection electrode 33 arranged on a top surface of the first bent section 32. The angular velocity sensor element is configured to increase sensitivity to an output signal in a manner that allows the first bent section 32 to be flexible due to bending stress applied thereto when a vector of Coriolis force generated by an angular velocity acts in a longitudinal direction of a first drive electrode vibration body 36.

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