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发明名称
Upper Lid for substrate processing apparatus
摘要
<p>본 발명은 내측에 윈도우가 구비되는 공간을 제공하는 외곽 프레임, 상기 외곽 프레임 내측에 구비되어, 외곽 프레임 내부 공간을 구획하는 구획 프레임 및 상기 구획 프레임을 가열하는 가열장치를 포함하는 기판처리장치의 상부리드를 제공한다.</p>
申请公布号
KR101208567(B1)
申请公布日期
2012.12.06
申请号
KR20110011183
申请日期
2011.02.08
申请人
发明人
分类号
H01L21/205;H05H1/24;H05H1/46
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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