| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus which can monitor transferring of a substrate by detecting a position of a substrate holding part holding and transferring the substrate. <P>SOLUTION: A substrate transfer apparatus comprises: a transportation mechanism including a support part supporting a substrate; a position detection part including a line sensor, and a light source irradiating light on the line sensor and arranged such that the light can be shielded by the support part when the transportation mechanism operates to move the support part; and a control part detecting a position of the transportation mechanism based on a signal from the line sensor. <P>COPYRIGHT: (C)2013,JPO&INPIT |
