发明名称 PRESSURE SENSOR
摘要 <p>A pressure sensor includes: a pressure conversion unit and a signal processing circuit installed in a semiconductor substrate. The pressure conversion unit includes: a diaphragm formed by partially thinning the semiconductor substrate; and a plurality of piezo resistive elements formed on a surface of the diaphragm. The signal processing circuit is constituted by a complementary metal-oxide semiconductor (CMOS) integrated circuit formed in a p-type conductive region disposed around the diaphragm on the surface of the semiconductor substrate, and the piezo resistive elements are provided by forming an n-type conductive region in the p-type conductive region on the surface of the diaphragm by diffusion of n-type impurities and diffusing p-type impurities in the n-type conductive region.</p>
申请公布号 EP2530444(A1) 申请公布日期 2012.12.05
申请号 EP20110736675 申请日期 2011.01.21
申请人 PANASONIC CORPORATION 发明人 NIIMURA, YUICHI;NOBE, TAKESHI;NISIKAWA, HIDEO;KATO, FUMIHITO
分类号 G01L9/00;H01L29/84 主分类号 G01L9/00
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