发明名称 METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE CONSISTING OF SEMICONDUCTOR MATERIAL HAVING A REDUCED MEAN FREE PATH LENGTH AND SEMICONDUCTOR DEVICE FABRICATED THEREBY
摘要 A method for producing a body (1) consisting of doped semiconductor material having a defined mean free path length (lambda n) for free charge carriers (CP), and a mean free path length (lambda r) for the free charge carriers (CP) which is smaller than the defined mean free path length (lambda n) is disclosed. An epitactic crystal layer (20) consisting of doped semiconductor material is produced on a substrate crystal (10) consisting of semiconductor material having the defined mean free path length (lambda n), said crystal layer having, at least locally, a mean free path length (lambda r) for the free charge carriers (CP) which is smaller than the defined mean free path length (lambda n). The body (1) can also be produced by joining two crystal bodies (10', 10'') consisting of doped semiconductor material.
申请公布号 EP1320897(B1) 申请公布日期 2012.12.05
申请号 EP20010985777 申请日期 2001.08.27
申请人 INFINEON TECHNOLOGIES AG 发明人 KARTAL, VELI;SCHULZE, HANS-JOACHIM
分类号 H01L21/20;H01L29/32;H01L21/02;H01L21/322;H01L29/36;H01L29/861 主分类号 H01L21/20
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