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发明名称
摘要
申请公布号
JP5090402(B2)
申请公布日期
2012.12.05
申请号
JP20090118914
申请日期
2009.05.15
申请人
发明人
分类号
H01L21/8238;H01L21/336;H01L21/822;H01L27/04;H01L27/08;H01L27/092;H01L29/78;H01L29/786;H03K19/20
主分类号
H01L21/8238
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代理人
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