| 摘要 |
The present invention provides a hydrogen-permeable film having a ceramic material of a nitride or oxide of a metal element belonging to group IVa, Va or VIa and hydrogen-permeable metal particles of at least one kind selected from palladium (Pd), niobium (Nb), vanadium (V), tantalum (Ta) and alloys thereof dispersed in the ceramic material, wherein the ratio of the hydrogen-permeable metal particles in the hydrogen-permeable film is 20 to 70 mass%, and the thickness of the hydrogen-permeable film is 5 to 1,000 nm. |
