发明名称 |
Illuminating optical apparatus, exposure apparatus and device manufacturing method |
摘要 |
An illumination optical apparatus is able to quickly perform switching of illumination conditions between illumination in a first region and illumination in a second region. The illumination optical apparatus of the present invention to illuminate an illumination target surface on the basis of light from a light source comprises: a path switching member arranged in an optical path between the light source and the illumination target surface and switching an optical path of an exiting beam between a first optical path and a second optical path; a path combining member combining the first optical path and the second optical path; a first pupil distribution forming member arranged in the first optical path and forming a predetermined light intensity distribution on an illumination pupil; and a second pupil distribution forming member arranged in the second optical path and forming a predetermined light intensity distribution on the illumination pupil. |
申请公布号 |
US8325324(B2) |
申请公布日期 |
2012.12.04 |
申请号 |
US20080252586 |
申请日期 |
2008.10.16 |
申请人 |
SHIGEMATSU KOJI;TANITSU OSAMU;NIKON CORPORATION |
发明人 |
SHIGEMATSU KOJI;TANITSU OSAMU |
分类号 |
G03B27/54;G03B27/42 |
主分类号 |
G03B27/54 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|