METHOD FOR MANUFACTURING GLASS SUBSTRATE AND ELECTRONIC DEVICE

摘要

Provided is a method for manufacturing a glass substrate including: a laminate producing step of producing a laminate (4) in which a glass film (1) and a support glass (2) are placed in close contact with an inorganic film (3) therebetween; a processing step of forming an electronic device material (5) on the glass film (1) of the laminate (4) to form a glass substrate (6); and a separation step of separating the entire glass substrate (6) from the support glass (2). After the processing step and before the separation step, a separation starting point forming step of forming a separation starting point (6x), which is to be the starting point of the separation step, is performed by irradiating the inorganic film (3) with a pulse laser (7) and separating a portion of the glass substrate (6) from the support glass (2) at the irradiated region (7x).