发明名称 Laser machining device with a converged laser beam and laser machining method
摘要 A laser machining device 1 includes a laser light source 10, a spatial light modulator 20, a controller 22, a converging optical system 30, and a shielding member 40. The phase-modulating spatial light modulator 20 inputs a laser beam outputted from the laser light source 10, displays a hologram modulating a phase of the laser beam at each of a plurality of pixels arranged two-dimensionally, and outputs the phase-modulated laser beam. The controller 22 causes the spatial light modulator 20 to display a plurality of holograms sequentially, lets the converging optical system 30 converge the laser beam outputted from the spatial light modulator 20 at converging positions having a fixed number of M, selectively places N converging positions out of the M converging positions into a machining region 91, and machines an object to be machined 90.
申请公布号 US8324529(B2) 申请公布日期 2012.12.04
申请号 US20080742491 申请日期 2008.08.26
申请人 MATSUMOTO NAOYA;INOUE TAKASHI;FUKUCHI NORIHIRO;ITO HARUYASU;TAKIGUCHI YUU;HAMAMATSU PHOTONICS K.K. 发明人 MATSUMOTO NAOYA;INOUE TAKASHI;FUKUCHI NORIHIRO;ITO HARUYASU;TAKIGUCHI YUU
分类号 B23K26/00;B23K26/02;B23K26/06;B23K26/14;B23K26/16 主分类号 B23K26/00
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