Cleaning block for nozzle device,申请号KR20060039441-传众专利搜索

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发明名称	Cleaning block for nozzle device
摘要
申请公布号	KR101206933(B1)	申请公布日期	2012.11.30
申请号	KR20060039441	申请日期	2006.05.02
申请人		发明人
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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