| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum pump capable of cost-advantageously correcting an unbalance change. <P>SOLUTION: This vacuum pump includes a rotor 20 including a balance means, driving devices 38 and 40 for rotating the rotor, bearings 44 and 50 for supporting the rotor, and a sensor means for measuring a balance state of the rotor and detecting a change in a balance state by cooperating with an adapted evaluation unit 134, and includes an allocating means for allocating the balance state to a rotor position so that the balance means can be adjusted for coping with a change in the balance state of cooperating with a rotor position detecting unit 132 for determining the rotor position. <P>COPYRIGHT: (C)2013,JPO&INPIT |
