| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for coating a quartz crucible for growing a silicon crystal, whereby the diameter of pinholes formed in a devitrified coating can be kept small. <P>SOLUTION: In this coating method, a bubble-free quartz layer having a thickness of 80 μm to 4 mm is formed on an inner surface of a quartz crucible for growing a silicon crystal, then the surface of the bubble-free quartz layer is covered with an alkaline earth hydroxide, and thereafter, heating is performed to at least a temperature at which the devitrification occurs in the surface. The surface may be covered by immersing the inner surface into a solution of the alkaline earth hydroxide. Further, the heating may be performed before the crucible for growing the silicon crystal is filled with a solid raw material to be melted. <P>COPYRIGHT: (C)2013,JPO&INPIT |
