| 摘要 |
A highly accurate static-pressure bearing apparatus that prevents vibrations may be achieved by configuring the apparatus comprising an orifice and a vent groove, etc., such that a laminar-flow status may be maintained in the entire region of the routes of the ventilated pressurized gas. A stage equipped with the static-pressure bearing apparatus is also provided. The configurations, such as the shapes of the orifice 14, vent groove 11, and the exhaust groove 12, etc., of the static-pressure bearing apparatus 1, are designed such that a laminar flow may be maintained in the entire region of the routes for ventilation of the pressurized gas. The vent groove 11 comprises the circular groove 11b and a plurality of distributing grooves 11a. The vent groove 11 is formed to be symmetrical about the centerline of the direction that the moving body 10 moves. The circular groove 11b is formed as a circle to surround the orifice 14. The plurality of distributing grooves 11a extend radially from the orifice 14 to the circular groove 11b such that the plurality of distributing grooves 11a connect the circular groove 11b and the orifice 14.
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