METHODS AND APPARATUS FOR CONTROLLING TEMPERATURE OF A MULTI-ZONE HEATER IN A PROCESS CHAMBER
摘要
<p>Methods and apparatus for controlling the temperature of multi-zone heater in a process chamber are provided herein. In some embodiments, a method is provided to control a multi-zone heater disposed in a substrate support, wherein the multi-zone heater has a first zone and a second zone. In some embodiments, the method may include measuring a current drawn by the first zone at a first time; measuring a voltage drawn by the first zone at the first time; calculating the resistance of the first zone based upon the measured current and voltage drawn by the first zone at the first time; determining a temperature of the first zone based upon a predetermined relationship between the resistance and the temperature of the first zone; and adjusting the temperature of the first zone in response to the temperature determination.</p>
申请公布号
WO2012162080(A1)
申请公布日期
2012.11.29
申请号
WO2012US38294
申请日期
2012.05.17
申请人
APPLIED MATERIALS, INC.;AMBAL, HARI KISHORE;HALLER, UWE PAUL;ZHOU, JIANHUA
发明人
AMBAL, HARI KISHORE;HALLER, UWE PAUL;ZHOU, JIANHUA