YTTRIUM OXIDE-CONTAINING MATERIAL, MEMBER OF SEMICONDUCTOR MANUFACTURING EQUIPMENT, AND METHOD OF PRODUCING YTTRIUM OXIDE-CONTAINING MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide an yttrium oxide-containing material with excellent mechanical characteristics.

SOLUTION: The yttrium oxide-containing material becomes strong by adding silicon carbide (SiC) and yttrium fluoride (YF3) to yttrium oxide (Y2O3), and yield, handling and reliabililty can be improved accordingly when this strengthened yttrium oxide-containing material is applied to a member of semiconductor manufacturing equipment.

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