| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a scribe device capable of eliminating troubles caused by the spattering of chips and offcuts when forming scribe grooves. <P>SOLUTION: In the scribe device A for forming scribe grooves by rotating a cutter wheel 11 on a substrate W to be machined, a gas blowing out opening 16 for blowing purge gas from a lateral side of the cutter wheel 11 to the cutter wheel 11 is arranged in a scribe head 7, and further a partitioning wall for intercepting the coming in of offcuts is arranged and a cover 17 where an opening 17a for passing purge gas advancing to the cutter wheel 11 along a substrate surface is arranged can be installed between the gas blowing out opening 16 and the cutter wheel 11. <P>COPYRIGHT: (C)2013,JPO&INPIT |
