| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow rate to particles activated by atmospheric pressure plasma without increasing structural restraints on a discharge space in a microwave discharge device. <P>SOLUTION: A microwave discharge device 1 comprises first and second conductors 21, 22 guiding microwaves; a discharge space 23 formed at terminal ends 21a, 22a of the respective conductors 21, 22; and a voltage source 3 generating an electric field applied to charged particles in the plasma generated in the discharge space 23. Plasma P is created by the microwaves guided by both of the conductors 21, 22. An electric field applied by the voltage source 3 generates a flow of gas containing the charged particles by applying an electromagnetic force to the charged particles in the plasma. The electric field can be applied with the terminal ends 21a, 22a as electrodes, and does not increase structural restraints on the discharge space 23. Particles activated by the plasma are contained in the gas, to which the flow rate is provided. <P>COPYRIGHT: (C)2013,JPO&INPIT |
