| 摘要 |
There is provided a vacuum degreasing and cleaning apparatus (1), including a cleaning chamber (4) having an injector (2a, 2b) and a sprayer (3) that eject a solvent to an object to be cleaned, a plurality of storage tanks (5a-5c) that store the solvent, a distiller (6) that distills the solvent in the storage tanks, and a replenisher tank (7) that stores the solvent distilled by the distiller, wherein a heating means (30) is provided in the inside of the sprayer in a nesting way. There is also provided a vacuum degreasing and cleaning method using the aforementioned vacuum degreasing and cleaning apparatus, wherein the solvent is pressurized and supplied to the inside of the sprayer, heated to a temperature not lower than a saturation temperature in the cleaning chamber under a reduced pressure, and thereafter sprayed in the cleaning chamber under the reduced pressure.
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