发明名称 Support equipment and method for calibrating the position
摘要 PURPOSE: A support device and a location correction method using the same are provide to control the thermal expansion and contraction due to temperature difference around objects. CONSTITUTION: A support device comprises a support member(110), a sensor(120), a temperature control element(140), and a control unit. The support member supports an object. The sensor is mounted on the support member, and senses the thermal change in the support member. The temperature control element is connected to the support member, and control the thermal change in the support member. The control unit controls the temperature control element in order to offset the thermal change in the support member.
申请公布号 KR20120128889(A) 申请公布日期 2012.11.28
申请号 KR20110046814 申请日期 2011.05.18
申请人 发明人
分类号 F16M11/04;G05D23/24;H01L35/28 主分类号 F16M11/04
代理机构 代理人
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