发明名称 Substrate Align Apparatus
摘要 PURPOSE: An apparatus for aligning a substrate is provided to prevent the error of electric connection by integrally aligning substrates in the process for boning stacked substrates. CONSTITUTION: A main body(100) is formed between a first substrate and a second substrate. Light sources(300,400,500,600) are arranged on one side of the main body. Am image sensor(200) is arranged in the front side of the main body in order to face a first substrate. The image sensor receives light generated from the light source to obtain an image.
申请公布号 KR20120129139(A) 申请公布日期 2012.11.28
申请号 KR20110047218 申请日期 2011.05.19
申请人 发明人
分类号 H01L21/68 主分类号 H01L21/68
代理机构 代理人
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