HOLDING MEMBER FOR INSPECTION, INSPECTING DEVICE, AND INSPECTING METHOD,申请号EP20070829980-传众专利搜索

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发明名称	HOLDING MEMBER FOR INSPECTION, INSPECTING DEVICE, AND INSPECTING METHOD
摘要
申请公布号	EP2088441(A4)	申请公布日期	2012.11.28
申请号	EP20070829980	申请日期	2007.10.17
申请人	TOKYO ELECTRON LIMITED	发明人	KOMATSU, SHIGEKAZU;MIYAZONO, MITSUYOSHI;ASAOKA, KAZUYA
分类号	G01R1/04	主分类号	G01R1/04
代理机构		代理人
主权项
地址

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