发明名称 |
Acoustic wave device and method for manufacturing the same |
摘要 |
Provided are an acoustic wave device and a method for manufacturing the same, the acoustic wave device being effectively prevented from expanding and contracting due to temperature change and having a small frequency shift. The acoustic wave device of the present invention has a piezoelectric substrate (1) having an IDT (2) formed on one principal surface of the piezoelectric substrate (1), and a thermal spray film (3) formed on an opposite principal surface (1b) of the piezoelectric substrate (1), the thermal spray film being of a material having a smaller linear thermal expansion coefficient than the piezoelectric substrate (1) and having grain boundaries and pores (4), at least a part of which is filled with a filling material (5). |
申请公布号 |
US8319394(B2) |
申请公布日期 |
2012.11.27 |
申请号 |
US20080864073 |
申请日期 |
2008.11.26 |
申请人 |
FUYUTSUME TOSHIYUKI;NISHINO TARO;YAMAZAKI HISASHI;ARAKI KIYOTO;TAMURA NOBORU;ICHIKAWA NAKABA;ARUGA MASAKI;MURATA MANUFACTURING CO., LTD.;KOIKE CO., LTD. |
发明人 |
FUYUTSUME TOSHIYUKI;NISHINO TARO;YAMAZAKI HISASHI;ARAKI KIYOTO;TAMURA NOBORU;ICHIKAWA NAKABA;ARUGA MASAKI |
分类号 |
H03H9/25 |
主分类号 |
H03H9/25 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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