发明名称 Method of producing a hybrid substrate having a continuous buried electrically insulating layer
摘要 A method for producing a hybrid substrate includes preparing a first substrate including a mixed layer and an underlying electrically insulating continuous layer, the mixed layer made up of first single-crystal areas and second adjacent amorphous areas, the second areas making up at least part of the free surface of the first substrate. A second substrate is bonded to the first substrate, the second substrate including on the surface thereof, a reference layer with a predetermined crystallographic orientation. The first substrate is bonded to the second substrate by hydrophobic molecular bonding of at least the amorphous areas. A recrystallization of at least part of the amorphous areas to solid phase is carried out according to the crystallographic orientation of the reference layer, and the two substrates are separated at the bonding interface.
申请公布号 US8318555(B2) 申请公布日期 2012.11.27
申请号 US200913125953 申请日期 2009.10.29
申请人 SIGNAMARCHEIX THOMAS;FOURNEL FRANCK;CLAVELIER LAURENT;DEGUET CHRYSTEL;COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES 发明人 SIGNAMARCHEIX THOMAS;FOURNEL FRANCK;CLAVELIER LAURENT;DEGUET CHRYSTEL
分类号 H01L21/84 主分类号 H01L21/84
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