发明名称 |
Probe device having a structure for being prevented from deforming |
摘要 |
A reinforcing member is formed at a top surface side of a probe card including a support plate for supporting a contactor and a circuit board. A plurality of long guide holes are formed in an outer peripheral portion of the reinforcing member. Fixing members fixed to a holding member and collars formed around outer circumferences of the fixing members are formed in the guide holes. A length in a longitudinal direction of each of the guide holes is greater than a diameter of each of the collars, and a central line in the longitudinal direction of each of the guide holes passes through a center of the reinforcing member. Due to the guide holes, horizontal expansion of the reinforcing member itself is allowed. |
申请公布号 |
US8319511(B2) |
申请公布日期 |
2012.11.27 |
申请号 |
US20080745306 |
申请日期 |
2008.11.05 |
申请人 |
YONEZAWA TOSHIHIRO;TAKASE SHINICHIRO;TOKYO ELECTRON LIMITED |
发明人 |
YONEZAWA TOSHIHIRO;TAKASE SHINICHIRO |
分类号 |
G01R31/00 |
主分类号 |
G01R31/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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