AN AIR BEARING DESIGN WITH A FLATTER PITCH PROFILE FOR REDUCING PARTICLE TAS

摘要

An embodiment of the present invention is an ABS design with a pitch ladder feature. This embodiment has an air flow squeezing channel which consists of one airflow blocker and three etching steps. The airflow blocker can be used to limit the incoming air flow from the leading edge of the ABS. Additionally, the embodiment contains an air channel that reduces altitude sensitivity by channeling air at the inner diameter into a sub-ambient pressure cavity.