| 摘要 |
<P>PROBLEM TO BE SOLVED: To simplify an entire configuration without using a high-voltage-resistance relay and perform a high-voltage application test in a current waveform (or a voltage waveform) conformed to the standards. <P>SOLUTION: An ESD (Electro-Static Discharge) testing device 1D according to the present embodiment 3 inspects an ESD resistance of a single or a plurality of inspection object devices. The ESD testing device turns on/off a switch 52 as switch means by a vertical movement of a contact stage 53 on which the single or the plurality of inspection object devices 54 are mounted; charges/discharges a high voltage of a high-voltage capacitor or capacitors 56 as high-voltage capacitance means each of which corresponds to each of the single or the plurality of inspection object devices 54; and performs the ESD inspection of the single or the plurality of inspection object devices 54 by the discharge from each high-voltage capacitor 56. <P>COPYRIGHT: (C)2013,JPO&INPIT |
