| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve a new reflection optical element and a new reflection optical system which can achieve high reflectance even for light of wide wavelength range, and are not damaged by heat even when used for the light having large light energy. <P>SOLUTION: The optical element for converting a traveling direction of a light beam has a prism shape including: an incidence surface SI; a reflection surface SR; and an emission surface SO. The optical element has a function for totally reflecting the light beam incident from the incidence surface SI at the reflection surface SR, making the reflected light beam emitted from the emission surface SO, and converting the traveling direction of the light beam. On at least one of the incidence surface SI and the emission surface SO, an antireflection layer SWS having a subwavelength structure is formed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
