发明名称 SEMICONDUCTOR APPARATUS AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor apparatus and a manufacturing method therefor is described. The semiconductor apparatus comprises a substrate and a gate structure for a N-channel semiconductor device above the substrate. A recess is formed at a lower end portion of at least one of two sides of the gate where it is adjacent to a source region and a drain region, of the N-channel semiconductor. The channel region of the N-channel semiconductor device has enhanced strain. The apparatus can further have a gate structure for a P-channel semiconductor device above the substrate.
申请公布号 US2012292699(A1) 申请公布日期 2012.11.22
申请号 US201213431728 申请日期 2012.03.27
申请人 WANG XINPENG;SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION 发明人 WANG XINPENG
分类号 H01L29/78;H01L21/28 主分类号 H01L29/78
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