| 摘要 |
The vacuum pump has a roller bearing (12) and permanent magnet bearing (14) that are spaced apart on a rotor shaft (10). The permanent magnet bearing is arranged with a bearing unit (18) and a bearing rotor (16) which repel each other. A force generator (30) is provided in the rotor shaft to generate wave force by thermal expansion of rotor shaft due to laod of roller and permanent magnet bearings. An independent claim is included for method for operating vacuum pump. |
