摘要 |
PURPOSE: A semiconductor inspection apparatus is provided to measure quantity of light in a state that is near to real specification by easily treating contact side radiation and contact rear side radiation. CONSTITUTION: An index table(2) moves a plurality of stages(21). A socket(6) is mounted on the stage. The socket supplies a predetermined voltage to each terminal of a plurality of LED element chips(5). A peaker(71) transfers the plurality of LED element chips to each socket on the stage. Peakers(72,73) transfer the LED device chips within the socket to a separate sheet according to inspection results. [Reference numerals] (81) Good quality product; (82) Defective product |