| 发明名称 |
Silver reflectors for semiconductor processing chambers |
| 摘要 |
A silver reflector for reflecting radiation from a lamp in a semiconductor processing chamber is disclosed. The reflector may be a sleeve to be disposed in a lightpipe or part of a lamphead. The silver may be in the form of a coating on the sleeve or the lamphead. |
| 申请公布号 |
US8314368(B2) |
申请公布日期 |
2012.11.20 |
| 申请号 |
US20080036078 |
申请日期 |
2008.02.22 |
| 申请人 |
RANISH JOSEPH M.;CHURTON KELLY;LINDSAY MARK E.;PLESHA MISCHA ANN;BERTA SAGE;APPLIED MATERIALS, INC. |
发明人 |
RANISH JOSEPH M.;CHURTON KELLY;LINDSAY MARK E.;PLESHA MISCHA ANN;BERTA SAGE |
| 分类号 |
F27B5/14;F21V7/10;F21V7/22;F27D11/00;G02B17/00 |
主分类号 |
F27B5/14 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
