发明名称 |
METHOD AND APPARATUS FOR PRODUCING SINGLE CRYSTALS COMPOSED OF SEMICONDUCTOR MATERIAL |
摘要 |
A method for producing a single crystal of semiconductor material having material properties of a zone-pulled single crystal includes providing a vessel transmissive to high frequency magnetic fields and having a granulate of a granular semiconductor material disposed therein and a first conductor disposed externally thereto. A high frequency current is supplied to a planar inductor disposed above the vessel, the planar inductor having a turn and a slit as a current supply so as to produce an open melt lake on the granulate by a temperature field at a surface of the granulate produced by thermal power of the planar inductor and a heating action of the first inductor, the melt lake being embedded in unmelted material of the granular semiconductor material and not being in contact with a wall of the vessel. A single crystal is pulled form the melt lake of the semiconductor material upwards. |
申请公布号 |
US2012285369(A1) |
申请公布日期 |
2012.11.15 |
申请号 |
US201013511751 |
申请日期 |
2010.11.23 |
申请人 |
RIEMANN HELGE;ABROSIMOV NIKOLAI V.;FISCHER JOERG;RENNER MATTHIAS;FORSCHUNGSVERBUND BERLIN E.V. |
发明人 |
RIEMANN HELGE;ABROSIMOV NIKOLAI V.;FISCHER JOERG;RENNER MATTHIAS |
分类号 |
C30B15/14;C30B15/02 |
主分类号 |
C30B15/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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