发明名称 SHEET-LIKE DEVICE MANUFACTURING APPARATUS AND SHEET-LIKE DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a sheet-like device manufacturing apparatus which can suppress an untransferred pattern and/or an insufficient pattern forming caused by residual gas or any non-contact part (unbonded part) generated between a mold and a base material. <P>SOLUTION: In a sheet-like device manufacturing apparatus, a base material 8 is sandwiched between a mold 4 having a pattern forming surface on which a pattern is formed and an elastomer body 9 arranged opposite to the mold 4, then the pattern forming surface is pressed and pressurized against resin on the base material 8, and the resin being in contact with the pattern forming surface is hardened. The elastomer body 9 arranged opposite to the mold 4 has a curved surface convexed toward the mold 4. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012227298(A) 申请公布日期 2012.11.15
申请号 JP20110092548 申请日期 2011.04.19
申请人 PANASONIC CORP 发明人 TAKAMI FUMINORI;WADA NORIHIKO;YAMADA AKIHISA;TAKASU YOSHIFUMI
分类号 H01L21/027;B29C59/02 主分类号 H01L21/027
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