| 摘要 |
<P>PROBLEM TO BE SOLVED: To allow a gas supply flow path to be purged without contact with the outside air and to efficiently supply filling gas while reducing loss of the filling gas, in a simple configuration. <P>SOLUTION: A gas supply apparatus includes: a container B filled therein with gas; a container valve Ba attached to the container B; a gas supply flow path Ls, a vent Lv, and a purge gas flow path Lp which are connected to the container valve Ba; an on-off valve Va and a pressure regulator Rs which are provided in the gas supply flow path Ls; an on-off valve Vb provided to the vent Lv; and a purge valve 10 with a nonreturn mechanism provided in the purge gas flow path Lp. The purge valve 10 has a fixing nut 4, packing 5, and a valve body 6, and can switch between flowing or blocking of purge gas to the purge gas flow path Lp via the purge valve 10 by operation of the fixing nut 4, characteristically. <P>COPYRIGHT: (C)2013,JPO&INPIT |
