发明名称 |
METHOD OF CONTROLLING AMOUNT OF ADSORBED CARBON NANOTUBES AND METHOD OF FABRICATING CARBON NANOTUBE DEVICE |
摘要 |
Provided are a method of controlling an amount of adsorbed carbon nanotubes (CNTs) and a method of fabricating a CNT device. The method of controlling an amount of adsorbed CNTs includes adsorbing CNT particles onto a semiconductor structure, and removing some of the adsorbed CNTs by performing an oxygen plasma treatment on the adsorbed CNT particles. |
申请公布号 |
US2012289029(A1) |
申请公布日期 |
2012.11.15 |
申请号 |
US201113307438 |
申请日期 |
2011.11.30 |
申请人 |
JHON YOUNG MIN;BYUN YOUNG TAE;JANG CHI WOONG;KIM KYEONG HEON;LEE SEOK;WOO DEOK HA;KIM SUN HO |
发明人 |
JHON YOUNG MIN;BYUN YOUNG TAE;JANG CHI WOONG;KIM KYEONG HEON;LEE SEOK;WOO DEOK HA;KIM SUN HO |
分类号 |
H01L21/20;B82Y40/00 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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