| 摘要 |
<P>PROBLEM TO BE SOLVED: To greatly improve a cleaning efficiency in a method for cleaning a substrate by the action of acoustic waves passing through a liquid in a container without substantially generating the reflection of the acoustic waves in the container. <P>SOLUTION: The substrate is placed in a tank containing a cleaning liquid at a prescribed angle with respect to the acoustic waves generated in the liquid. The angle corresponds to that of transmission, that is, the angle at which waves are not reflected off the substrate surface. A damping material is provided in the tank and is arranged to substantially absorb all waves transmitted through the substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
