| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluidized-bed reactor capable of uniformly supplying enough heat for silicon deposition and flowing gas, capable of mass-producing a polycrystalline silicon, and easy to assemble, install, and maintain. <P>SOLUTION: The fluidized-bed reactor includes a reaction tube, a flowing gas supply unit that supplies the flowing gas in the reaction tube by independent control, and a reaction gas supply unit that supplies a reaction gas in the reaction tube. <P>COPYRIGHT: (C)2013,JPO&INPIT |
