发明名称 HEAT SHIELD MODULE FOR SUBSTRATE-LIKE METROLOGY DEVICE
摘要 A heat shield module includes top and bottom portions made of a high heat material. The top and bottom portions attached to each other and form an enclosure with an opening sized to receive an electronic component package with no intervening insulating material between a component and the top and bottom portions. One or more legs are mounted to either the top portion or the bottom portion. The legs are configured to attach the enclosure to a substrate and to form a gap between the bottom surface of the bottom portion and a top surface of the substrate.
申请公布号 US2012287574(A1) 申请公布日期 2012.11.15
申请号 US201113104874 申请日期 2011.05.10
申请人 KLA-TENCOR CORPORATION 发明人 VISHAL VAIBHAW;SUN MEI
分类号 H05K7/20;B32B7/08 主分类号 H05K7/20
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