| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oscillator device such as an optical deflector capable of adjusting the inertial moment or the center-of-gravity position of an oscillation part within a relatively large range at a relatively high speed. <P>SOLUTION: The oscillator device includes an oscillation part, elastic supports 305 and 306, and a support 301, and the oscillation part is supported to oscillate around an oscillation axis 304 by the elastic supports. The oscillation part includes movable elements 302 and 320 having projected parts 303 and 321 for adjusting the mass of the oscillation part. The projected parts project from the movable elements in a direction parallel to the oscillation axis, and formed to be cut at any places in the projecting direction. The sectional areas of the projected parts to the oscillation axis as a normal are constant in the direction of the oscillation axis. <P>COPYRIGHT: (C)2013,JPO&INPIT |
