摘要 |
In an embodiment, a semiconductor device includes a single-layer gate nonvolatile memory in which a floating gate is formed on a semiconductor substrate. The floating gate is formed above a diffusion layer serving as a control gate of the nonvolatile memory. The diffusion layer may be insulated from the semiconductor substrate by an insulating film such as a silicon oxide film. A pair of diffusion layers may be formed in surface regions of the semiconductor substrate on the two sides of the floating gate extending on a tunnel oxide film in an embodiment. The configuration described herein may realize a reliable semiconductor device in a low-cost process, may have a control gate which may withstand a high voltage applied when data is erased or written, and may prevent an operation error by minimizing variations in the threshold value, in some embodiments. |