Cooling arrangement used for cooling elongated magnetron used in continuous coating system for coating target material onto substrate, has coolant inlet and outlet that are provided at ends of magnetron

摘要

The cooling arrangement has a magnet unit that generates magnetic field penetrating a target (2), and a cooling unit comprising cooling medium circulating in longitudinal direction of a coolant guide and a coolant guide supplying inlet. The coolant from a coolant inlet at an end of magnetron (1), is supplied to coolant guide. The target and coolant guide are thermally connected. The coolant inlet and outlet are provided at ends (12,14) of magnetron. The supply and return lines are connected to a deflecting end (16), where coolant is circulated in opposite direction.